EMIL at BESSY II uniquely combines industry-relevant deposition tools that are in-system connected to off- and on-synchrotron analysis chambers providing a complementing set of photon-in-electron-out and photon-in-photon-out spectroscopic techniques that make full use of the “two-color” beamline that allows a “depth-dependent” characterization of thin-film layer stack samples using an x-ray photon energy range from the soft (80 eV) to the hard (10.000 eV) x-ray energy regime. EMIL is thus particularly well suited for in-system, in-situ, and operando characterization of energy conversion materials and structures revealing their chemical and electronic structure (incl. energy level alignment), etc.
The SISSY lab at EMIL connects measurement chambers for electron and x-ray spectroscopic measurements with chambers for various sample deposition and treatment techniques via an automated ultra-high vacuum (UHV) transfer system. This arrangement allows in-system deposition and characterization as well as characterization of samples produced externally. Introduction and removal of materials to the UHV system via load lock connected to an inert gas glove box allows environmentally sensitive samples to be measured without air exposure. The system also features an open port, where specially designed “vacuum suitcases” can be connected to introduce especially sensitive samples into the system. Within the EMIL lab there is also a fully equipped chemistry laboratory including two inert gas glove boxes, a clean room, as well as standard measurement setups for sample pre-characterization by AFM, XRD, Raman, UV-VIS, Dektak, etc. are available.
Figure 1 Experimental setup available at HZB for advanced characterization and in-situ sample processing for measurement campaigns. Key purpose of combining the various analysis tools is to acquire information of the chemical state and electronic properties of the sample at varied information depth.
The beamline provides x-ray excitation tuneable across an extremely wide range of photon energies, from 80eV to 10keV. The primary measurement techniques are x-ray photoemission spectroscopy and x-ray absorption spectroscopy
Since HZB is a user facility, all facilities are in place to handle and support external users, e.g. accommodation is available for BESSY II users at the IBZ guesthouse
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